Spin Coating Unit

PROGRAMMABLE SPIN COATING UNIT:-

MAKE: HE (GMP/ISO 9001 – 2015/GMP/CE Certified )

Model: HSC – 8000

Technical Specification: -

• Polypropylene Working Chamber (removable), size 6-inch dia, with transparent photo resist lid with interlock safety switch.

• 500 – 8000 RPM

• Accuracy<±0.5% of Full Speed

• Microprocessor Programmable Speed control with respect to time Preset editable programs of 1 program X 64 step

• Real time display of RPM, time and program stamps

• Nonvolatile program memory

• Input & control through soft touch key pad.

• Vacuum release switch

• Substrate size from 0. 04sq.inch (28 sq.mm) to 4.0 sq. inch

(for glass substrate) & 20.0 sq. inch (for silicon wafers)

• Vacuum chuck: derlin made circular substrate holders of Dia 0.5”,1”,1.5”,2.0” inch

• Microprocessor control A C brush less motor

• Acceleration 2000 rpm/sec (Maximum) use settable

• Calibration option.

• Vacuum Dial gauge.

• Frame: Epoxy coated MS.

• Facility for interlocking with Vacuum Pump.

• Tubing for Vacuum.

• Gas Purging Attachment for Nitrogen.

• Spill drainage facility

• To operate on 230V ± 10%, 1 phase 50 Hz AC only.

• Maximum Power 190W, Current 1.0 Amp.

Vacuum Pump: -

Make: HE (NSIC Regd, MSME Regd, ISO 9001 – 2015/14001-2015/13485-2016/FDA/ GMP/CE Certified)

Model Technical Name

HE115 N Flow rate 50 Hz

42 L/min

60 Hz 60 Hz

50 L/min

Ultimate vacuum Partial Pressure

Total Pressure Total Pressure

Power

Inlet Port